Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators\nand sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can\nbe classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have\nbeen conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper\ndiscusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms\nfor MEMS.
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